Microprocessing using UV solid state laser systems with high repetition rate

Andreas Ostendorf; Klaus Koerber; Christian Kulik; Frank Otte

doi:10.1117/12.486508

19 February 2003 Microprocessing using UV solid-state laser systems with high repetition rate

Andreas Ostendorf, Klaus Koerber, Christian Kulik, Frank Otte

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486508
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

In this paper investigation of using frequency-converted diode-pumped solid-state laser for substituting conventional industrial machining processes like in the MST is presented. For industrial application a decreasing of the processing time is demanded. This study shows that the pulse energy of current available DPSS lasers is nearly sufficient to meet the demands for industrial laser cutting and selective ablation processes.

Citation Download Citation

Andreas Ostendorf, Klaus Koerber, Christian Kulik, and Frank Otte "Microprocessing using UV solid-state laser systems with high repetition rate", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486508

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