Application of spectral reflectivity to the measurement of thin-film thickness

Tony Flaherty; Gerard M. O'Connor

doi:10.1117/12.464264

27 August 2003 Application of spectral reflectivity to the measurement of thin-film thickness

Tony Flaherty, Gerard M. O'Connor

Proceedings Volume 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications; (2003) https://doi.org/10.1117/12.464264
Event: OPTO Ireland, 2002, Galway, Ireland

Abstract

The aim of this work is to investigate the application of the spectral reflectance technique to thickness measurement of highly localised semi-transparent coatings on miniature geometries, such as those used in the medical devices industry. The paper will describe the application of the technique to coatings on curved or non-uniform surfaces such as narrow-bore metal tubes and thin wires. The paper will describe the equipment used including a spectrometer with micro-focus attachment, and optical modelling software. This work also involved laser-drilling of the polymer films to allow complementary step-height measurements to be made. Special steps were also required to overcome problems in measurement due to the transparency of the thin films. Complementary techniques including white-light interferometry, which were used to benchmark the method, will also be described.

Citation Download Citation

Tony Flaherty and Gerard M. O'Connor "Application of spectral reflectivity to the measurement of thin-film thickness", Proc. SPIE 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications, (27 August 2003); https://doi.org/10.1117/12.464264

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