Further developments in distributed hierarchical processing

Paul DePesa; Danny Keogan

doi:10.1117/12.469151

27 December 2002 Further Developments in Distributed Hierarchical Processing

Paul DePesa, Danny Keogan

Proceedings Volume 4889, 22nd Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.469151
Event: Photomask Technology 2002, 2002, Monterey, CA, United States

Abstract

In the paper given by these authors this spring at Photomask Japan, investigations into the advances in the CATS tool that combine hierarchical fracturing and distributed processing were begun. In addition to the beneficial reduction in processing times, various shortcomings of the software were detailed. For this study, the next version of the CATS software tool has been made available and those shortcomings are remedied. Difficult model OPC (MOPC) fractures and complicated de-slivering fractures for variable shaped beam machines are analyzed. Timing results, exclusive-OR operations, and the implications of Amdahl’s Law are also considered. Further intricacies of Linux cluster computing are also addressed.

Citation Download Citation

Paul DePesa and Danny Keogan "Further Developments in Distributed Hierarchical Processing", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); https://doi.org/10.1117/12.469151

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