Precise and accurate characterization of DUV and V-UV phase-shifting mask materials by combined V-UV spectroscopic ellipsometry and x-ray reflectometry

Pierre Boher; Adrien Darragon; Christophe Defranoux; Jean-Claude Fouere; Jean-Louis P. Stehle

doi:10.1117/12.474127

27 December 2002 Precise and accurate characterization of DUV and V-UV phase shifting mask materials by combined V-UV spectroscopic ellipsometry and x-ray reflectometry

Pierre Boher, Adrien Darragon, Christophe Defranoux, Jean-Claude Fouere, Jean-Louis P. Stehle

Author Affiliations +

Proceedings Volume 4889, 22nd Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.474127
Event: Photomask Technology 2002, 2002, Monterey, CA, United States

Abstract

Precise characterization of the thin films for phase-shift masks is important to guarantee the optical properties of the phase shifters. This can be accomplished by using a novel instrument that combines Grazing angle C-ray Reflectometry and V-UV Spectroscopic Ellipsometry. For example, CrON_x and MoSiN_x thin films can be precisely characterized for layer thickness and optical constants, and for spectral reflectance/transmittance at any photolithography wavelength of interest..

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Pierre Boher, Adrien Darragon, Christophe Defranoux, Jean-Claude Fouere, and Jean-Louis P. Stehle "Precise and accurate characterization of DUV and V-UV phase shifting mask materials by combined V-UV spectroscopic ellipsometry and x-ray reflectometry", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); https://doi.org/10.1117/12.474127

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