Laser triangulation systems for sensing mirror surface

Sergei Vasilievich Mikhlyaev

doi:10.1117/12.484605

29 July 2002 Laser triangulation systems for sensing mirror surface

Sergei Vasilievich Mikhlyaev

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484605
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

An analysis of measurement errors of distance to the surface with narrow scattering indicatrix (mirror surface) by laser triangulation is given. We consider two types of sensors: with output plane orthogonal to the optical axis, and with tilted one (corresponding to the Scheimpflug principle). The conditions of Scheimpflug principle applicability for mirror surface testing are determined. We have shown, that at a certain ratio of parameters of optical system of the sensor to the probing light beam, the sensor with orthogonal plane of photoregistration can provide a smaller level of measurement errors than sensor with tilted output plane, despite the presence of defocusing. These advantages remain valid also at small surface tilts.

Citation Download Citation

Sergei Vasilievich Mikhlyaev "Laser triangulation systems for sensing mirror surface", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484605

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KEYWORDS

Sensors

Mirrors

Sensing systems

Error analysis

Distance measurement

Gaussian beams

Laser scattering

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