System approach to MEMS commercialization

Vladimir Vaganov

doi:10.1117/12.480619

23 August 2002 System approach to MEMS commercialization

Vladimir Vaganov

Proceedings Volume 4906, Optical Components and Transmission Systems; (2002) https://doi.org/10.1117/12.480619
Event: Asia-Pacific Optical and Wireless Communications 2002, 2002, Shanghai, China

Abstract

The system approach considers a priori the interdependence of all technologies integrated into a MEMS product. Parallel development of these technologies and enabling wafer-level batch manufacturing through process integration is key to successful product development and meaningful cost reduction.

Citation Download Citation

Vladimir Vaganov "System approach to MEMS commercialization", Proc. SPIE 4906, Optical Components and Transmission Systems, (23 August 2002); https://doi.org/10.1117/12.480619

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