Study for piezoelectricity characterization of PZT actuators deposited by RF magnetron sputtering for MEMS

Kazuyoshi Tsuchiya; Toshiaki Kitagawa; Eiji Nakamachi

doi:10.1117/12.469669

13 November 2002 Study for piezoelectric characterization of PZT actuators deposited by RF magnetron sputtering for MEMS

Kazuyoshi Tsuchiya, Toshiaki Kitagawa, Eiji Nakamachi

Author Affiliations +

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.469669
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Pb(Zr,Ti)O₃ piezoelectric material(PZT) has been utilized for a microactuators or microsensors. Because PZT piezoelectric materials have higher power or larger displacement than the other piezoelectric materials such as BaTiO₃. The PZT thin films were deposited onto a heated Invar alloy by using a high temperature RF magnetron sputtering. The chemical composition and the crystalline structure for deposited PZT were measured by ESCA and XRD, respectively. The chemical composition of PZT deposited stoichiometrically was almost same as the commercial based bulk PZT composition. Crystal planes (110) and (111) of PZT Perovskite structure were observed in XRD analysis. Employing over 600 degree heating, almost no pinhole on the surface was observed by SEM. Thin film actuator with 500 nm thickness has been also characterized by measuring the piezoelectric property using Laser Doppler Vibrograph. It was confirmed that the piezoelectric property has a linear relationship with the grain size, which also increased with the substrate temperature. Therefore, it is possible to control piezoelectric properties by the sizes of PZT grain, which is grown by heating substrate. The piezoelectric property of deposited PZT thin films showed a good agreement with a quoted value of bulk PZT, when the substrates were heated up at 600 degree.

Citation Download Citation

Kazuyoshi Tsuchiya, Toshiaki Kitagawa, and Eiji Nakamachi "Study for piezoelectric characterization of PZT actuators deposited by RF magnetron sputtering for MEMS", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.469669

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