Laser processing of photonic and microelectronic components using multiple visible and UV wavelength source

Elizabeth K. Illy; Graham Rutterford; Martyn R. H. Knowles

doi:10.1117/12.479238

17 October 2003 Laser processing of photonic and microelectronic components using multiple visible and UV wavelength source

Elizabeth K. Illy, Graham Rutterford, Martyn R. H. Knowles

Author Affiliations +

Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479238
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States

Abstract

Laser processing using a multiple visible and UV wavelength copper laser source is presented with particular emphasis on photonic and microelectronic applications. Visible micromachining of ceramics and diamond are discussed in addition to UV micromachining/microfabrication of germanium doped silica, sapphire and kapton.

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Elizabeth K. Illy, Graham Rutterford, and Martyn R. H. Knowles "Laser processing of photonic and microelectronic components using multiple visible and UV wavelength source", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); https://doi.org/10.1117/12.479238

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