Borosilicate-glass-based x-ray masks for LIGA microfabrication

Yohannes M. Desta; Martin Bednarzik; Michael D. Bryant; Jost Goettert; Linke Jian; Yoonyoung Jin; Daejong Kim; Sanghoon Lee; Bernd Loechel; Hans-Ulrich Scheunemann; Zhengchun Peng

doi:10.1117/12.478258

15 January 2003 Borosilicate glass based x-ray masks for LIGA microfabrication

Yohannes M. Desta, Martin Bednarzik, Michael D. Bryant, Jost Goettert, Linke Jian, Yoonyoung Jin, Daejong Kim, Sanghoon Lee, Bernd Loechel, Hans-Ulrich Scheunemann, Zhengchun Peng

Author Affiliations +

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.478258
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

During the past few years, graphite based X-ray masks have been in use at CAMD and BESSY to build a variety of high aspect ratio microstructures and devices where low side wall surface roughness is not needed In order to obtain lower sidewall surface roughness while maintaining the ease of fabrication of the graphite based X-ray masks, the use of borosilicate glass was explored. A borosilicate glass manufactured by Schott Glas (Mainz, Germany) was selected due to its high purity and availability in ultra-thin sheets (30 μm). The fabrication process of the X-ray masks involves the mounting of a 30 μm glass sheet to either a stainless steel ring at room temperature or an invar ring at an elevated temperature followed by resist application, lithography, and gold electroplating. A stress free membrane is obtained by mounting the thin glass sheet to a stainless steel ring, while mounting on an invar ring at an elevated temperature produces a pre-stressed membrane ensuring that the membrane will remain taut during X-ray exposure. X-ray masks have been produced by using both thick negative- and positive-tone photoresists. The membrane mounting, resist application, lithography, and gold electroplating processes have been optimized to yield X-ray masks with absorber thicknesses ranging from 10 μm to 25 μm. Poly(methyl methacrylate) layers of 100 μm to 400 μm have been successfully patterned using the glass membrane masks.

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Yohannes M. Desta, Martin Bednarzik, Michael D. Bryant, Jost Goettert, Linke Jian, Yoonyoung Jin, Daejong Kim, Sanghoon Lee, Bernd Loechel, Hans-Ulrich Scheunemann, and Zhengchun Peng "Borosilicate glass based x-ray masks for LIGA microfabrication", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.478258

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