Reliability evaluation of thermally actuated micromachined relays for space applications

Alexander Teverovsky; A. K. Sharma

doi:10.1117/12.472726

16 January 2003 Reliability evaluation of thermally actuated micromachined relays for space applications

Alexander Teverovsky, A. K. Sharma

Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003) https://doi.org/10.1117/12.472726
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

This paper reports results on electrical characteristics, evaluation of design, and reliability of the first commercially available micromachined relays. The parts have been characterized in a wide range of temperatures (from 100 degrees C to +180 degrees C) and load conditions (voltages from 10 V to 70 V and currents from 5 mA to 200 mA). Mechanical integrity of the parts has been evaluated by subjecting them to multiple mechanical shocks in the range from 100 G to 1000 G up to 10,000 shocks. Life testing was performed at different contact voltages and current loads during 10⁸ switching cycles. To simulate space operation conditions, characteristics of the parts were monitored during vacuum testing. Typical failure modes associated with different test conditions are discussed.

Citation Download Citation

Alexander Teverovsky and A. K. Sharma "Reliability evaluation of thermally actuated micromachined relays for space applications", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); https://doi.org/10.1117/12.472726

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