The Stanford Nanofabrication Facility and the National Nanofabrication Users' Network: the ultimate sandbox for bioMEMS and bioengineering R&D

Mary X. Tang

doi:10.1117/12.480772

17 January 2003 The Stanford Nanofabrication Facility and the National Nanofabrication Users' Network: the ultimate sandbox for bioMEMS and bioengineering R&D

Mary X. Tang

Author Affiliations +

Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003) https://doi.org/10.1117/12.480772
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

As cutting-edge research becomes more multidisciplinary, it becomes increasingly difficult to find experimental and laboratory resources that can support such broadly defined research. The five, founding-member university facilities of the Nanofabrication Users' Network (NNUN) have been providing such broad-based resources for nine years. The goal of the NNUN is not only to develop micro- and nanotechnology fabrication resources and expertise across a broad range of disciplines, but also to encourage researchers from industry as well as academia outside the network to make use of our facilities. All NNUN sites are shared-equipment, open-use laboratories featuring a broad range of micro- and nanofabrication equipment. The NNUN is comprised of two main "hub" facilities at Stanford and Cornell Universities, and three "satellite" facilities at the University of California, Santa Barbara, Penn State University, and Howard University. Based on the academic traditions of openness and sharing, these facilities comprise a vibrant, dynamic community of researchers. Our lab members come from a wide variety of disciplines, with research in areas of optics, MEMS, biology, and chemistry, as well as process characterization and fabrication of more traditional electronics devices. We are especially committed to supporting use of micro- and nanofabrication technologies in non-traditional research applications. The NNUN is supported by the National Science Foundation under cooperative agreements ECS-9731293 and ECS-9731294.

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Mary X. Tang "The Stanford Nanofabrication Facility and the National Nanofabrication Users' Network: the ultimate sandbox for bioMEMS and bioengineering R&D", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); https://doi.org/10.1117/12.480772

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KEYWORDS

Nanofabrication

Biomedical optics

Microelectromechanical systems

Biology

Nanotechnology

BioMEMS

Chemistry

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