Novel approaches to maximizing micromachining throughput by minimizing positioner inertia, servo following errors, and unobservable resonant responses

Scott Jordan

doi:10.1117/12.477861

17 January 2003 Novel approaches to maximizing micromachining throughput by minimizing positioner inertia, servo following errors, and unobservable resonant responses

Scott Jordan

Author Affiliations +

Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.477861
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Significant advancements in the field of controls engineering have recently been commercialized which have application to the fields of micromachining as well as for automated alignment, precision machining, tracking and active optics: 1. Cost effective, industrial-class implementations of Momentum Compensation (also known as Frahm Damping) provide low-order cancellation of inertial inputs to supporting structures and are of particular applicability to structures with low natural resonance frequencies; 2. Input Shaping, a patented digital controls algorithm developed at the Massachusetts Institute of Technology, provides effective cancellation of structural resonances in arbitrary actuation; 3. Input Preshaping, a technique realized in both a priori and self-learning implementations, substantially eliminates following errors in repetitive actuation. Simultaneous advancements in the minimization of multi-axis positioner workpiece mass via parallel kinematics technologies have increased the native bandwidth of the positioners used in these throughput-intensive applications. The author reviews applications of each of these, alone and together, in a comprehensive overview of the state of the art of high-bandwidth positioning techniques for micropatterning and micromachining.

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Scott Jordan "Novel approaches to maximizing micromachining throughput by minimizing positioner inertia, servo following errors, and unobservable resonant responses", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); https://doi.org/10.1117/12.477861

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KEYWORDS

Servomechanisms

Micromachining

Control systems

Telescopes

Kinematics

Algorithm development

Active optics

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