Device for controlling a charged particle beam structure

A. N. Kozlov; V. D. Smolyaninov; A. P. Eremin; Anatoly M. Filachev

doi:10.1117/12.497623

1 April 2003 Device for controlling a charged particle beam structure

A. N. Kozlov, V. D. Smolyaninov, A. P. Eremin, Anatoly M. Filachev

Proceedings Volume 5025, Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; (2003) https://doi.org/10.1117/12.497623
Event: Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2001, Moscow, Russian Federation

Abstract

For maintenance repeatability technological of ion processing, it is necessary to support density of ion current and distribution density of ion current by constants. For this purpose the control device of ion sources with a wide beam has been developed. In this work the device for exact reproduction structure of a beam negatively or positively charged particles, is described. Calculation mistakes of measurement currents for the given device are resulted.

Citation Download Citation

A. N. Kozlov, V. D. Smolyaninov, A. P. Eremin, and Anatoly M. Filachev "Device for controlling a charged particle beam structure", Proc. SPIE 5025, Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 April 2003); https://doi.org/10.1117/12.497623

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