Scanning probe lithography

Dorjderem Nyamjav; Albena Ivanisevic

doi:10.1117/12.484991

16 June 2003 Scanning probe lithography

Dorjderem Nyamjav, Albena Ivanisevic

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.484991
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

We present a new methodology to fabricate surface structures based on coated magnetic particles and charged polymers. We control the surface architecture via a nanolithographic approach, Dip-Pen Nanolithography, which utilizes Atomic Force Microscopy (AFM) to delivery molecular "inks" on soid substrates. This process results in surfaces with a pre-programmed architecture composed of well-characterized negatively and postively charged polymeric regions. Charged magnetic particles coated via the Layer-by-Layer method can be assembled onto the pre-programmed surface blue-print using electrostatic interactions. The possibility of incorporating our templates in simple device strategies is currently being explored.

Citation Download Citation

Dorjderem Nyamjav and Albena Ivanisevic "Scanning probe lithography", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.484991

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