Paper
31 July 2003 Development of the active vibration isolation device using PZT wafers
Moon K. Kwak, Seok Heo, Seung Rok Kim
Author Affiliations +
Abstract
This paper is concerned with the development of an active vibration isolation device using PZT wafers. The main task of the device is to protect vibration-sensitive instruments from hazardous environments. The device developed in this study consists of S-shaped supporters bonded with PZT wafers, passive damping materials and piezoceramic sensors that can measure the relative motion between the base and the platform. The newly developed device can produce discernible displacement thus providing a way of counteracting external disturbances. Control techniques, which can fully utilize the functions of the device, are also developed. The experimental results show that the proposed device and the control techniques are capable of isolating vibrations thus useful in protecting sensitive instruments from external vibrations.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Moon K. Kwak, Seok Heo, and Seung Rok Kim "Development of the active vibration isolation device using PZT wafers", Proc. SPIE 5052, Smart Structures and Materials 2003: Damping and Isolation, (31 July 2003); https://doi.org/10.1117/12.483774
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CITATIONS
Cited by 1 scholarly publication.
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KEYWORDS
Vibration isolation

Sensors

Actuators

Control systems

Ferroelectric materials

Semiconducting wafers

Aluminum

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