Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser

Masashi Masuda; Koji Sugioka; Ya Cheng; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa

doi:10.1117/12.541066

18 November 2003 Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser

Masashi Masuda, Koji Sugioka, Ya Cheng, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.541066
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

We show that femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties on transparency, hardness, chemical and thermal resistances. After exposure of the focused laser beam, the latent images are written. Modified regions are developed by a post baking process and then preferentially etched away in dilute solution of hydrofluoric (HF) acid solution in an ultrasonic bath at room temperature. The contrast ratio in etching selectivity is examined for different concentration of HF solution. Based on this result, a freely movable microplate which has a function of microvalve in the microreactor is fabricated inside the glass.

Citation Download Citation

Masashi Masuda, Koji Sugioka, Ya Cheng, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda, and Katsumi Midorikawa "Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.541066

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