Glass processing using microsecond, nanosecond and femtosecond pulsed lasers

Arzu Ozkan; Leonard R. Migliore; Corey M. Dunsky; Michael W. Phaneuf

doi:10.1117/12.540701

18 November 2003 Glass processing using microsecond, nanosecond and femtosecond pulsed lasers

Arzu Ozkan, Leonard R. Migliore, Corey M. Dunsky, Michael W. Phaneuf

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540701
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

Laser processing of glass components is of significant commercial interest for the optoelectronics and telecommunications industries. In this paper, we present laser processing techniques using microsecond, nanosecond, and femtosecond lasers for machining of glass. Surface structures, mainly groove geometries, are generated with a diode-pumped solid-state nanosecond pulsed UV laser operating at 266 nm, a Q-switched CO₂ laser operating at 9.25 μm, a CO₂ laser operating at 10.6 μm and the femtosecond pulsed laser operating at 800 nm. Grooves are cross-sectioned and viewed with a focused ion beam (FIB) microscope. The resultant material structures are examined with respect to the differences in time scale and the appropriateness of each laser type for particular processes.

Citation Download Citation

Arzu Ozkan, Leonard R. Migliore, Corey M. Dunsky, and Michael W. Phaneuf "Glass processing using microsecond, nanosecond and femtosecond pulsed lasers", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540701

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