High precision deep drilling with ultrashort pulses

Christian Foehl; Friedrich Dausinger

doi:10.1117/12.540506

18 November 2003 High precision deep drilling with ultrashort pulses

Christian Foehl, Friedrich Dausinger

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540506
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

Ultrashort laser pulses appear very promising for material removal with highest precision. However, our investigations show several unexpected quality problems such as formation of recast, ripples, and irregular hole shapes even in the femtosecond-pulse regime. In this contribution influences on drilling efficiency and hole quality by several process parameters such as repetition rate and pulse duration will be presented and discussed. Furthermore different processing techniques to increase the drilling velocity will be shown. A suitable device for that purpose is a trepanning optic which was specially designed for the drilling of injection nozzles. By a variable angle of beam incidence it allows to produce holes with a well-defined conicity in combination with the high precision achieved by helical drilling.

Citation Download Citation

Christian Foehl and Friedrich Dausinger "High precision deep drilling with ultrashort pulses", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540506

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