Site-selective dye deposition onto micropatterns of fused silica fabricated with laser-induced backside wet etching (LIBWE)

Ximing Ding; Yoshizo Kawaguchi; Tadatake Sato; Aiko Narazaki; Hiroyuki Niino

doi:10.1117/12.541072

18 November 2003 Site-selective dye deposition onto micropatterns of fused silica fabricated with laser-induced backside wet etching (LIBWE)

Ximing Ding, Yoshizo Kawaguchi, Tadatake Sato, Aiko Narazaki, Hiroyuki Niino

Author Affiliations +

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.541072
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

A novel approach for the fabrication of micropatterns where dye molecules can be site-selectively desposited is described. The micropatterns were fabricated on the surface of fused silica plates using the technique of laser-induced backside wet etching (LIBWE). Prior to the LIBWE process, the surface properties of the fused silica plates were modified with self-assembling trimethoxysilanes bearing functional moieties. On the non-irradiated areas, the self-assembled monolayers (SAMs) survived the LIBWE process, and the remaining SAM acted as a template for the subsequent dye deposition either with chemical bonding or physical adsorption. Site-selective dye deposition was visualized with fluorescence microscopic observation. These results are applicable for micro-fluidic reactors and chemical sensors.

Citation Download Citation

Ximing Ding, Yoshizo Kawaguchi, Tadatake Sato, Aiko Narazaki, and Hiroyuki Niino "Site-selective dye deposition onto micropatterns of fused silica fabricated with laser-induced backside wet etching (LIBWE)", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.541072

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