Microstructuring of Pyrex glass and polymers by excimer laser

Bernd Keiper; Robby Ebert; Rico Bohme; Horst Exner

doi:10.1117/12.499002

24 April 2003 Microstructuring of PYREX glass and polymers by excimer laser

Bernd Keiper, Robby Ebert, Rico Bohme, Horst Exner

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.499002
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

Presently, there is a growing demand from the industry for microprocessing of materials. For applications in microsystems technology and biotechnology it is particularly necessary to produce structures with dimensions down to the micrometer scale. This refers especially to materials that can not or not in a sufficiently quality be processed by conventional methods of silicon technologies. In order to fulfil the industrial demands we have investigated the structuring of anodic bondable PYREX glass and of polymers by means of laser microprocessing using the excimer laser mask projection technique (193 nm wavelength, 10 ns pulse duration, 8 mJ pulse energy, 500 Hz repetition rate). In our paper we will show the dependence of the obtained quality especially the roughness of the generated surfaces on the processing parameters. The possibilities of our technology including the creation of holes, channels and three dimensional microstructures will be presented too. Single structures e.g. bridges and grooves are attainable with widths of 10 micrometers and below. Some of the drilled holes (diameter about 50 µm) have been successfully filled inside with aluminium by a laser assisted CVD process.

Citation Download Citation

Bernd Keiper, Robby Ebert, Rico Bohme, and Horst Exner "Microstructuring of PYREX glass and polymers by excimer laser", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499002

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