Paper
22 December 2003 Recent developments of multi-aperture overlap-scanning technique
Mingyi Chen, Hongwei Guo, Yingjie Yu, Haitao He
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Abstract
In this paper, the multi-aperture overlap-scanning technique (MAOST) and its recent developments are presented. In the first instance, MAOST is used in interferometry, and the principle of MAOST for interferometry is that, a tested large-scale plane is covered by an array of interferometric subapertures, and the relationship between each couple of adjacent subapertures is determined from their overlapping areas by a least squares method, and then the profile of tested plane is obtained by connecting all the subapertures together. Recently, to meet the requirements of advanced manufacturing, the idea of MAOST has been extended to precision three-dimensional (3-D) measurement. In practice, a whole-body 3-D shape is acquired by two steps: first measuring the 3-D shape from different views and afterwards connecting all the views together. In order to accurately determine the position and orientation of every single-view in a common coordinate system, an iterative algorithm based on MAOST concept is utilized.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mingyi Chen, Hongwei Guo, Yingjie Yu, and Haitao He "Recent developments of multi-aperture overlap-scanning technique", Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); https://doi.org/10.1117/12.505340
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Interferometry

3D metrology

Optical testing

Interferometers

Optics manufacturing

Precision measurement

Manufacturing

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