Analog proximity-photolithography with mask aligners for the manufacturing of micro-optical elements

Tobias Erdmann; Matthias Cumme; Lars-Christian Wittig; Ernst-Bernhard Kley; Frank Wyrowski; Andreas Tuennermann

doi:10.1117/12.505751

3 November 2003 Analog proximity-photolithography with mask aligners for the manufacturing of micro-optical elements

Tobias Erdmann, Matthias Cumme, Lars-Christian Wittig, Ernst-Bernhard Kley, Frank Wyrowski, Andreas Tuennermann

Proceedings Volume 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II; (2003) https://doi.org/10.1117/12.505751
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We report on a new approach in analog photolithography for the manufacturing of optical elements with a continuous profile. It is based on a phase-only mask used in a mask aligner.The advantage of this new approach is that it is contact free, i.e.there is a gap between the mask and the substrate during the exposure. That allows a non-destructive mask lithography.

Citation Download Citation

Tobias Erdmann, Matthias Cumme, Lars-Christian Wittig, Ernst-Bernhard Kley, Frank Wyrowski, and Andreas Tuennermann "Analog proximity-photolithography with mask aligners for the manufacturing of micro-optical elements", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); https://doi.org/10.1117/12.505751

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available