Calibration of nanotransducer by a monolithic x-ray interferometer

Jin Won Park; Cheon Il Eom; Sang Ho Byun

doi:10.1117/12.509725

20 November 2003 Calibration of nanotransducer by a monolithic x-ray interferometer

Jin Won Park, Cheon Il Eom, Sang Ho Byun

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.509725
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

A monolithic x-ray interferometer manufactured at KRISS has been used to provide a means for the calibration of transducers with the traceability to the standards of length in the sub-nanometer region. Such calibration by the monolithic x-ray interferometer using the lattice spacing of silicon is directly traceable to primary standards. The lattice plane used for diffraction was (220) with lattice parameter of 0.192 nm. One period of the x-ray interference fringe corresponds to the lattice parameter. We could achieve a resolution of less than 0.01 nm by detecting the phase of the x-ray interference signal. A monolithic x-ray interferometer was made from a silicon single crystal. It comprises three thin lamellas called splitter, mirror, and analyzer, and it incorporates a double parallel spring structure for the translation of the analyzer lamella. The x-ray interferometer has been applied to the measurements of displacements at sub-nanometer levels. The displacements of linear transducers have been measured using the x-ray interferometer. Several capacitive sensors were also calibrated and the results of these measurements are reported in the paper.

Citation Download Citation

Jin Won Park, Cheon Il Eom, and Sang Ho Byun "Calibration of nanotransducer by a monolithic x-ray interferometer", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.509725

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