Principal length specifying parameters of material artifacts, their physical meaning, methods for their measurements, and typical uncertainties

Alexander Titov; Igor Malinovsky; Carlos Alberto Massone

doi:10.1117/12.505552

20 November 2003 Principal length specifying parameters of material artifacts, their physical meaning, methods for their measurements, and typical uncertainties

Alexander Titov, Igor Malinovsky, Carlos Alberto Massone

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Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.505552
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The basis of new, parallax-free methods of length measurements by optical interferometry is presented. Two new length specifying parameters of a material end standard, i.e. optical and mechanical lengths of a block are introduced, that give the possibility to realize more accurately the length unit. A traceability of the mechanical and optical lengths, obtained by optical interferometry, to the basic physical quantity, the length of a material artifact, has been established for the first time. We present here the system of equations which shows the inter-relation between these lengths, and links them to the results of the basic interferometric length measurements and to such quantities as skin depth, roughness values of the gauging surfaces, wringing in surface deformations, excessive wringing film thickness, interferometer optics distortions. Experimental confirmation of the main theoretical relations is presented. We discuss in detail the key feature of optical and mechanical length measurements and give examples of their uncertainty budget evaluations.

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Alexander Titov, Igor Malinovsky, and Carlos Alberto Massone "Principal length specifying parameters of material artifacts, their physical meaning, methods for their measurements, and typical uncertainties", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.505552

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KEYWORDS

Interferometers

Optical testing

Quartz

Distance measurement

Interferometry

Refractive index

Optical calibration

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