Output energy and conversion efficiency of extreme ultraviolet radiation from rare gas cryogenic targets

Takeshi Higashiguchi; Takahiro Hirata; Masato Koga; Chirag Rajyaguru; Wataru Sasaki; Shoichi Kubodera

doi:10.1117/12.509448

7 January 2004 Output energy and conversion efficiency of extreme ultraviolet radiation from rare gas cryogenic targets

Takeshi Higashiguchi, Takahiro Hirata, Masato Koga, Chirag Rajyaguru, Wataru Sasaki, Shoichi Kubodera

Proceedings Volume 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications; (2004) https://doi.org/10.1117/12.509448
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Characteristics of extreme ultraviolet (EUV) light at the wavelength between 5 to 20 nm from rare gas cryogenic targets irradiated with a nano-second laser pulse are studied. Spatial distribution of the EUV light and the ion current was measured and found to vary as cos²θ and cos⁶θ, respectively, where θ is an angle to the target normal. Energetic ions were detected, which had a velocity of the order of 10⁶ cm/s. According to the observed cos²θ spatial distribution, the spatially-integrated total EUV output energy for the xenon cryogenic target was evaluated to be 1.5 mJ/pulse, leading to the conversion efficiency of 0.2%/pulse.

Citation Download Citation

Takeshi Higashiguchi, Takahiro Hirata, Masato Koga, Chirag Rajyaguru, Wataru Sasaki, and Shoichi Kubodera "Output energy and conversion efficiency of extreme ultraviolet radiation from rare gas cryogenic targets", Proc. SPIE 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, (7 January 2004); https://doi.org/10.1117/12.509448

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