Pulsed laser deposition of thin films: elimination of particulates by second laser irradiation

Eniko Gyorgy; Ion N. Mihailescu; Michael Kompitsas; A. Giannoudakos

doi:10.1117/12.519509

4 November 2003 Pulsed laser deposition of thin films: elimination of particulates by second laser irradiation

Eniko Gyorgy, Ion N. Mihailescu, Michael Kompitsas, A. Giannoudakos

Proceedings Volume 5226, 12th International School on Quantum Electronics: Laser Physics and Applications; (2003) https://doi.org/10.1117/12.519509
Event: 12th International School on Quantum Electronics Laser Physics and Applications, 2002, Varna, Bulgaria

Abstract

Pulsed laser deposition of thin films has besides numerous advantages a major shortcoming which is the presence of particulates of various shapes and dimensions both on surface and inside obtained structures. Indeed, in many key technological applications the use of completely particulates free films is mandatory. We demonstrated that the origin of size and density of particulates depend on specific experimental conditions. Nevertheless, the proper choice of deposition conditions (i.e. ablating laser wavelength and fluence, target-collector separation distance, growing temperature, ambient gas nature and pressure) allows for the decrease under a certain extent of pollution with particulates, but not for their complete elimination. This lecture reports our successful attempts to obtain completely particulates free deposited structures using two synchronized pulsed laser sources. The first, UV laser source was used to ablate the target material. The second, IR laser system was directed parallel to the target surface. The role of the second laser was to heat and vaporize the particulates present in the tail of the plasma ablated by the pulsed UV laser source.

Citation Download Citation

Eniko Gyorgy, Ion N. Mihailescu, Michael Kompitsas, and A. Giannoudakos "Pulsed laser deposition of thin films: elimination of particulates by second laser irradiation", Proc. SPIE 5226, 12th International School on Quantum Electronics: Laser Physics and Applications, (4 November 2003); https://doi.org/10.1117/12.519509

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KEYWORDS

Ultraviolet radiation

Plasma

Thin films

Thin film deposition

Laser ablation

Laser sources

Liquids

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