Principles of highest-precision optical parts estimation on the basis of a point-diffraction interferometer

Nikolay B. Voznesensky; Kyeong-Hee Lee; Vladimir K. Kirillovsky

doi:10.1117/12.512231

26 February 2004 Principles of highest-precision optical parts estimation on the basis of a point-diffraction interferometer

Nikolay B. Voznesensky, Kyeong-Hee Lee, Vladimir K. Kirillovsky

Author Affiliations +

Proceedings Volume 5252, Optical Fabrication, Testing, and Metrology; (2004) https://doi.org/10.1117/12.512231
Event: Optical Systems Design, 2003, St. Etienne, France

Abstract

Problem of testing fine optics in industrial conditions with the highest accuracy is considered. Requirements to the quality of optical surfaces and wavefront errors referred to various kinds of optical systems are discussed. The disadvantages of the use of test parts with etalon surfaces in interferometric measurements are considered and the dead circle of the use of the unknown-shaped reference surfaces is revealed. The solution of this problem is proposed through application of the point diffraction interferometer (PDI). The advanced schematic of such an interferometer is presented; unlimited accuracy and industrial testing possibilities of the upgraded Linnik interferometer are discussed.

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Nikolay B. Voznesensky, Kyeong-Hee Lee, and Vladimir K. Kirillovsky "Principles of highest-precision optical parts estimation on the basis of a point-diffraction interferometer", Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); https://doi.org/10.1117/12.512231

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