Electronic packaging: new results in singulation by Laser Microjet

Frank Wagner; Ochelio Sibailly; Bernold Richerzhagen

doi:10.1117/12.529021

15 July 2004 Electronic packaging: new results in singulation by Laser Microjet

Frank Wagner, Ochelio Sibailly, Bernold Richerzhagen

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.529021
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

Cutting electronic packages that are produced in a matrix array fashion is an important process and deals with the ready-to-use devices. Thus an increase in the singulation yield is directly correlated to an increase in benefit. Due to the usage of different substrate materials, the saws encounter big problems in terms of lifetime and constancy of cut quality in these applications. Today’s equipment manufacturers are not yet in the position to propose an adequate solution for all types of packages. Compared to classical laser cutting, the water-jet guided laser technology minimizes the heat damages in any kind of sample. This new material processing method consists in guiding a laser beam inside a hair thin, lowpressure water-jet by total internal reflection, and is applied to package singulation since two years approximately. Using a frequency doubled Nd:YAG laser guided by a water jet, an LTCC-ceramics based package is singulated according to a scribe and break process. Speeds of 2-10 mm/s are reached in the LTTC and 40 mm/s in the mold compound. The process is wear-free and provides very good edge quality of the LTCC and the mold compound as well as reliable separation of the packages.

Citation Download Citation

Frank Wagner, Ochelio Sibailly, and Bernold Richerzhagen "Electronic packaging: new results in singulation by Laser Microjet", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.529021

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