Optical MEMS at Silex Microsystems

Magnus Rimskog; Edvard Kaelvesten; Niklas Svedin

doi:10.1117/12.524705

24 January 2004 Optical MEMS at Silex Microsystems

Magnus Rimskog, Edvard Kaelvesten, Niklas Svedin

Proceedings Volume 5346, MOEMS and Miniaturized Systems IV; (2004) https://doi.org/10.1117/12.524705
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

Silex Microsystems produces Silicon Optical Benches and Silicon Optical Mirrors for a variety of customers on an international market. The core of the activity is the MEMS chip itself and the related processes. By qualifying processes Silex provides the opportunity for clients to increase the degree of development in the MEMS cores of their products. The designs are customized in order to meet the specifications for a wide customer base with even wider demands. The Silicon Optical Benches can incorporate BCB layers in order to integrate RF-lines and make it possible to design for example coils of high performance. The polysilicon resistors have been qualified to be stable within 3-ppm over 6 months at elevated temperatures. The polysilicon temperature dependence makes it possible to use the resistors in order to measure temperature and excludes thermistors from the designs. Electrical feed through vias can be incorporated to enable backside connection and simplify packaging. The Silicon Optical Mirrors are produced both as large arrays of small mirrors and smaller arrays of larger mirrors depending on applications. Also for the mirrors the incorporations of electrical vias simplify design and process issues. The pads under the mirrors are connected from backside and it is possible to avoid difficult contacting down in cavities.

Citation Download Citation

Magnus Rimskog, Edvard Kaelvesten, and Niklas Svedin "Optical MEMS at Silex Microsystems", Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, (24 January 2004); https://doi.org/10.1117/12.524705

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