Tightly confining AlGaAs waveguides and microcavities for optical frequency conversion

Luigi Scaccabarozzi; Zheng Wang; Xiaojun Yu; Wah Tung Lau; Mehemet Fatih Yanik; Shanhui Fan; Martin M. Fejer; James S. Harris Jr.

doi:10.1117/12.532124

28 May 2004 Tightly confining AlGaAs waveguides and microcavities for optical frequency conversion

Luigi Scaccabarozzi, Zheng Wang, Xiaojun Yu, Wah Tung Lau, Mehemet Fatih Yanik, Shanhui Fan, Martin M. Fejer, James S. Harris Jr.

Author Affiliations +

Proceedings Volume 5355, Integrated Optics: Devices, Materials, and Technologies VIII; (2004) https://doi.org/10.1117/12.532124
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States

Abstract

We present the design and fabrication process for an AlGaAs optical frequency conversion device based on tightly confining waveguides and a Photonic Bandgap Crystal Microcavity. We first theoretically analyze the improvement in non-linear conversion efficiency due to a high confinement cavity, compared to traditional QPM waveguides. The theoretical analysis is supported by finite difference frequency and time domain simulations. The theoretical conversion efficiency estimated with these tools is ~4%/mW for a device ~10 μm long. Influence of sidewall roughness on the Q of the cavity is also analyzed. Then, we describe the fabrication process of our device, which involves molecular beam epitaxy, electron beam lithography and plasma etching.

Citation Download Citation

Luigi Scaccabarozzi, Zheng Wang, Xiaojun Yu, Wah Tung Lau, Mehemet Fatih Yanik, Shanhui Fan, Martin M. Fejer, and James S. Harris Jr. "Tightly confining AlGaAs waveguides and microcavities for optical frequency conversion", Proc. SPIE 5355, Integrated Optics: Devices, Materials, and Technologies VIII, (28 May 2004); https://doi.org/10.1117/12.532124

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