Approach for reducing resist footing over nonplanar wafer

Ayako Endo; Takashi Sato; Masafumi Asano; Shoji Mimotogi; Soichi Inoue

doi:10.1117/12.536108

28 May 2004 Approach for reducing resist footing over nonplanar wafer

Ayako Endo, Takashi Sato, Masafumi Asano, Shoji Mimotogi, Soichi Inoue

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.536108
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

We have studied the lithography issue of resist footing in an ion implant layer after a gate conductor formation. In a previous report , we proposed the shadow model and showed a solution to reduce the resist footing. This paper reports on the further investigation into the cause and the reduction method of the resist footing over non-planar wafer with simulation and explains the effects with the shadow model. We analyzed the processes that affected the resist footing and four main effects were selected. These were NA, illumination coherency, mask bias, and mask type. We simulated these four effects on an orthogonal array by using the design of experiments (DOE). We obtained a better condition of higher NA, smaller coherency, positive mask bias, and Att-PSM for reducing the resist footing. We explain the reasons for these effective factors with the shadow model.

Citation Download Citation

Ayako Endo, Takashi Sato, Masafumi Asano, Shoji Mimotogi, and Soichi Inoue "Approach for reducing resist footing over nonplanar wafer", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.536108

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available