Mix-and-match overlay method by compensating dynamic scan distortion error

Takuya Kono; Manabu Takakuwa; Keita Asanuma; Nobuhiro Komine; Tatsuhiko Higashiki

doi:10.1117/12.535097

29 April 2004 Mix-and-match overlay method by compensating dynamic scan distortion error

Takuya Kono, Manabu Takakuwa, Keita Asanuma, Nobuhiro Komine, Tatsuhiko Higashiki

Proceedings Volume 5378, Data Analysis and Modeling for Process Control; (2004) https://doi.org/10.1117/12.535097
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

This paper discusses the compensation method and APC system to reduce errors in mix and matching overlay between scanners. We proposed the compensation model for intra-field errors in mix and matching. And we developed the advanced APC system also to improve dynamic scan distortion using the compensation model.

Citation Download Citation

Takuya Kono, Manabu Takakuwa, Keita Asanuma, Nobuhiro Komine, and Tatsuhiko Higashiki "Mix-and-match overlay method by compensating dynamic scan distortion error", Proc. SPIE 5378, Data Analysis and Modeling for Process Control, (29 April 2004); https://doi.org/10.1117/12.535097

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