Capabilities and limitations of micro-opto-electro-mechnical (MOEM) accelerometers: an analysis

Ananth Selvarajan; Jagannath Nayak; Talabuttala Srinivas; D. V. K. Sastry

doi:10.1117/12.546460

29 July 2004 Capabilities and limitations of micro-opto-electro-mechnical (MOEM) accelerometers: an analysis

Ananth Selvarajan, Jagannath Nayak, Talabuttala Srinivas, D. V. K. Sastry

Proceedings Volume 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2004) https://doi.org/10.1117/12.546460
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

Micro-Opto-Electro-Mechanical (MOEM) accelerometers employing a cantilever beam and anti resonant reflecting optical waveguide (ARROW) on a silicon is analyzed. Two types of MOEM accelerometers and a closed loop operation that can enhance the performance significantly compared to MEMS accelerometer is presented. As a typical example our study shows a MOEM accelerometer with a minimum detectable acceleration of 0.255 μ g/√Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/°c and shock survivability of more than 1000 g.

Citation Download Citation

Ananth Selvarajan, Jagannath Nayak, Talabuttala Srinivas, and D. V. K. Sastry "Capabilities and limitations of micro-opto-electro-mechnical (MOEM) accelerometers: an analysis", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); https://doi.org/10.1117/12.546460

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