The investigations of ferroelectric thin films in virtual measuring system

Eugeny Ph. Pevtsov; Alexander S. Sigov; A. Pyzhova; A. Gorelov

doi:10.1117/12.562657

28 May 2004 The investigations of ferroelectric thin films in virtual measuring system

Eugeny Ph. Pevtsov, Alexander S. Sigov, A. Pyzhova, A. Gorelov

Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.562657
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation

Abstract

We designed the laboratory automation for the ferroelectric thin films investigation, which differs from analogous by open architecture. This equipment is quite adopted with hardware and software of the leading companies (e.g., GPIB boards and LabView National Instruments) in the field of measuring technique and systems of data acquisition. It makes possible to carry out measuring of basic characteristics of ferroelectrics: studying the ferroelectric hysteresis, determining pyroelectric coefficient by static and quasy-static techniques, taking magnitude of remanent polarization, measuring dielectric constants, measuring the specimen electrical conductance. The measuring system has open architecture and it is easy to readjust it to solve specific problems including applications, for example, optimization of technological processes of ferroelectric films fabrication for memory devices or uncooled focal plane arrays. Basing on this measuring system there were developed several methods which give an opportunity to improve the comprehension of processes in ferroelectric systems from physical point of view.

Citation Download Citation

Eugeny Ph. Pevtsov, Alexander S. Sigov, A. Pyzhova, and A. Gorelov "The investigations of ferroelectric thin films in virtual measuring system", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.562657

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