Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs and InP substrates

B. Haji-Saeed; R. Kolluru; Dana Pyburn; R. Leon; S. K. Sengupta; Markus E. Testorf; W. D. Goodhue; Jed Khoury; Alvin J. Drehman; Charles L. Woods; John Kierstead

doi:10.1117/12.548069

12 April 2004 Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs and InP substrates

B. Haji-Saeed, R. Kolluru, Dana Pyburn, R. Leon, S. K. Sengupta, Markus E. Testorf, W. D. Goodhue, Jed Khoury, Alvin J. Drehman, Charles L. Woods, John Kierstead

Author Affiliations +

Proceedings Volume 5437, Optical Pattern Recognition XV; (2004) https://doi.org/10.1117/12.548069
Event: Defense and Security, 2004, Orlando, Florida, United States

Abstract

The fabrication and characterization of an optically addressable deformable mirror for spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5-μm thick grid of patterned photoresist supports the 2-μm thick aluminized Mylar membrane. A conductive ZnO layer is placed on the backside of the GaAs wafer. Similar devices were also fabricated with InP. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage and frequency. A simplified analysis of device operation is also presented.

Citation Download Citation

B. Haji-Saeed, R. Kolluru, Dana Pyburn, R. Leon, S. K. Sengupta, Markus E. Testorf, W. D. Goodhue, Jed Khoury, Alvin J. Drehman, Charles L. Woods, and John Kierstead "Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs and InP substrates", Proc. SPIE 5437, Optical Pattern Recognition XV, (12 April 2004); https://doi.org/10.1117/12.548069

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available