Use of acoustic waves in x-ray topography of silicon crystals

S. N. Novikov; D. G. Fedortsov; V. V. Dovganyuk

doi:10.1117/12.560005

4 June 2004 Use of acoustic waves in x-ray topography of silicon crystals

S. N. Novikov, D. G. Fedortsov, V. V. Dovganyuk

Proceedings Volume 5477, Sixth International Conference on Correlation Optics; (2004) https://doi.org/10.1117/12.560005
Event: Sixth International Conference on Correlation Optics, 2003, Chernivsti, Ukraine

Abstract

The influence of transverse ultrasonic wave parameters on the diffraction contrast forming on X-ray section topographs for microdefects and dislocations was investigated by the numerical solution of Takagi's equations system. The corresponding changes of integral characteristics of structural imperfections for real crystals were analyzed also.

Citation Download Citation

S. N. Novikov, D. G. Fedortsov, and V. V. Dovganyuk "Use of acoustic waves in x-ray topography of silicon crystals", Proc. SPIE 5477, Sixth International Conference on Correlation Optics, (4 June 2004); https://doi.org/10.1117/12.560005

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