Characteristics of diffractive optical element for multispot beam homogenizing

Takayuki Hirai; Keiji Fuse; Kenichi Kurisu; Keiji Ebata

doi:10.1117/12.557490

29 September 2004 Characteristics of diffractive optical element for multispot beam homogenizing

Takayuki Hirai, Keiji Fuse, Kenichi Kurisu, Keiji Ebata

Proceedings Volume 5525, Laser Beam Shaping V; (2004) https://doi.org/10.1117/12.557490
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Laser materials processing has been used increasingly over the wide area of electronic industries, especially for drilling microvias in printed circuit boards, and poly-silicon annealing for thin film transistor of liquid crystal display. To increase a processing speed, it has been developed a beam splitting element of a diffractive optical element (DOE). And the other hand, to obtain higher uniformity, because the intensity distribution of laser beam is usually a non-uniform gaussian profile, beam homogenizer of a DOE has recently been developed and introduced to some promising applications. Through the improvement of optical design algorithms, micro-fabrication techniques of a phase pattern of DOE and new method of optical system, it enables to combine its beam splitting function and homogenizing function. It can produce the simultaneous multi-spot homogenized beam. In this investigation, we introduce a concrete design and fabrication result of multi-spot beam homogenizing system for SHG-YAG laser that can convert a gaussian distribution into the plural number of uniformity intensity distribution, and present the possibility of new laser material processing by using such optics.

Citation Download Citation

Takayuki Hirai, Keiji Fuse, Kenichi Kurisu, and Keiji Ebata "Characteristics of diffractive optical element for multispot beam homogenizing", Proc. SPIE 5525, Laser Beam Shaping V, (29 September 2004); https://doi.org/10.1117/12.557490

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available