Analysis of variations of the thickness-phase objects by lateral shearing interferometry and white light scanning interferometry

Hernando R. Altamar; Arturo Plata

doi:10.1117/12.591957

21 October 2004 Analysis of variations of the thickness-phase objects by lateral shearing interferometry and white light scanning interferometry

Hernando R. Altamar, Arturo Plata

Author Affiliations +

Proceedings Volume 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications; (2004) https://doi.org/10.1117/12.591957
Event: 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, 2004, Porlamar, Venezuela

Abstract

The interferometric techniques of lateral shearing and white light scanning interferometry are combined to determine the variations of thickness of phase objects and the thickness of such objects is approximated through B-splines functions.

Citation Download Citation

Hernando R. Altamar and Arturo Plata "Analysis of variations of the thickness-phase objects by lateral shearing interferometry and white light scanning interferometry", Proc. SPIE 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, (21 October 2004); https://doi.org/10.1117/12.591957

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