Paper
3 January 2005 Super-resolution optical mastering system using blue laser and high-numeric-aperture lens
Xiaodong Fan, Duanyi Xu, Guosheng Qi, Peijun Jiang, Kun Qian
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Abstract
A practical mastering technology was developed using a blue laser optical mastering system with a wavelength of 405 nm, a numeric aperture (NA) of 0.95 and a phase-shift apodizer. The laser is shaped and collimated by a space filter with its diameter 2μm, then is split into two beams by polarizing prism. One beam is used to detection of the optical power, and the other beam is used to write data on the disc. The phase-shift mask is lay between the collimating lens and the polarizing prism to optimizing the intensity distribution of Airy point on the disc. The lens with high NA 0.95 is designed to make the image point of the laser less then the diffraction point. The air-operated focus control device is used to focalize the light on the disc. Based on the technology, the recording spot with its diameter about 223nm is achieved.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiaodong Fan, Duanyi Xu, Guosheng Qi, Peijun Jiang, and Kun Qian "Super-resolution optical mastering system using blue laser and high-numeric-aperture lens", Proc. SPIE 5643, Advances in Optical Data Storage Technology, (3 January 2005); https://doi.org/10.1117/12.578181
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Cited by 1 scholarly publication.
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KEYWORDS
Optical filters

Super resolution

Objectives

Laser systems engineering

Control systems

Digital video discs

Electron beam lithography

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