Performance of uncooled microcantilever thermal detectors

Panos G. Datskos; Slobodan Rajic; Nickolay V. Lavrik

doi:10.1117/12.590823

22 January 2005 Performance of uncooled microcantilever thermal detectors

Panos G. Datskos, Slobodan Rajic, Nickolay V. Lavrik

Proceedings Volume 5721, MOEMS Display and Imaging Systems III; (2005) https://doi.org/10.1117/12.590823
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Bimaterial microcantilevers arranged into focal plane arrays (FPAs) can function as uncooled IR imaging devices. In order to analyze the performance of such devices and compare various FPAs, it is essential to have an in-depth understanding of their operation, figures of merit, and fundamental limitations. We give an overview of figures of merit that are applicable to both cooled and uncooled IR detectors. Specific focus of this chapter is a performance analysis for microcantilever IR detectors with an optical readout. We discuss responsivity of microcantilever IR detectors and analyze the different sources (and mechanisms) of noise present in them. A model SiN_x microcantilever device with an Al layer in the bimaterial region was fabricated and its performance as an IR detector was analyzed.

Citation Download Citation

Panos G. Datskos, Slobodan Rajic, and Nickolay V. Lavrik "Performance of uncooled microcantilever thermal detectors", Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); https://doi.org/10.1117/12.590823

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available