Optical microphone using a silicon-based guided-wave optical pressure sensor

Hiroyuki Nikkuni; Shuuichi Dokko; Masashi Ohkawa; Seishi Sekine; Takashi Sato

doi:10.1117/12.588456

31 March 2005 Optical microphone using a silicon-based guided-wave optical pressure sensor

Hiroyuki Nikkuni, Shuuichi Dokko, Masashi Ohkawa, Seishi Sekine, Takashi Sato

Proceedings Volume 5728, Integrated Optics: Devices, Materials, and Technologies IX; (2005) https://doi.org/10.1117/12.588456
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

In this paper, an optical microphone using a silicon-based guided-wave optical pressure sensor as an opto-mechanical transducer is reported. The pressure sensor consists of a rectangular diaphragm and a straight waveguide on the diaphragm. The sensitivity of the sensor and the resonance frequency of the diaphragm are important factors to determine the characteristics of the microphone, and depend on the diaphragm dimensions. In this study, to examine a feasibility of the proposed optical microphone, the target values of phase sensitivity and resonance frequency were set at 1.6 mrad/Pa and 7 kHz, respectively. By design considerations, the diaphragm dimensions were determined to be 7 mmX7 mmX23 μm. After fabrication of the optical microphone, sound pressure from 5 to 25 Pa, with a frequency of 1 kHz, was applied to the fabricated microphone with a 7 mmX7 mmX27 μm diaphragm. During measurement, a lock-in detection was taken because the fabricated pressure sensor had an unexpected low sensitivity, which resulted in an extremely low S/N ratio. The measured output voltage from the lock-in amplifier was proportional to the sound pressure as expected although the lock-in detection is not practical for the microphone.

Citation Download Citation

Hiroyuki Nikkuni, Shuuichi Dokko, Masashi Ohkawa, Seishi Sekine, and Takashi Sato "Optical microphone using a silicon-based guided-wave optical pressure sensor", Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, (31 March 2005); https://doi.org/10.1117/12.588456

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