Press-patterned diffraction gratings on high refractive index polyimide films

Ramil L. Mercado; Rebecca Rich; Wu-Sheng Shih; Udayan Senapati; Doug Holmes

doi:10.1117/12.590515

31 March 2005 Press-patterned diffraction gratings on high refractive index polyimide films

Ramil L. Mercado, Rebecca Rich, Wu-Sheng Shih, Udayan Senapati, Doug Holmes

Proceedings Volume 5728, Integrated Optics: Devices, Materials, and Technologies IX; (2005) https://doi.org/10.1117/12.590515
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

Press-patterning of polymers to yield optical structures is being pursued in optics and photonics to yield low-cost optical components. This is a promising technology for the low-cost and high-throughput fabrication of polymeric photonic components. The processing of such imprinted photonic components is usually done using a metallic shim where a pattern is generated on the shim by electroforming or electroplating. The shims are then used to replicate patterns on plastics and polymers under high temperatures and pressures. Under the correct conditions, the polymer flows and replicates a diffraction grating. Polymeric diffraction gratings and holograms have applications in a multitude of photonic applications for diffractive optics. This requires materials that are transparent in the visible region, and preferably have relatively high refractive indices in order to achieve a high diffraction efficiency. In addition, in order to facilitate processing by the press-patterning method that will be further described in this paper, polymeric materials that are amenable to spin-coating and show good thermoplastic behavior are also desired. Optically transparent, high-refractive index polyimides were tested for their ability to be processed and patterned using a press-patterning method. A process that allowed the materials to be patterned were developed, and measurements were taken to validate the results. Our initial results showed successful press-patterned polyimide films with grating structures having submicron line and trench widths and step heights of less than 0.5 microns.

Citation Download Citation

Ramil L. Mercado, Rebecca Rich, Wu-Sheng Shih, Udayan Senapati, and Doug Holmes "Press-patterned diffraction gratings on high refractive index polyimide films", Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, (31 March 2005); https://doi.org/10.1117/12.590515

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