Paper
25 March 2005 Planar lightwave integrated circuits integrated with thin film active optoelectronic devices
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Abstract
The integration of active optoelectronic devices, passive optical devices, and electronics into planar lightwave integrated circuits (PLICs) at the chip level, and planar lightwave integrated systems (PLIS) at the substrate or package level, have applications in optical interconnection, optical signal distribution and processing, and in integrated optical sensing. Heterogeneous integration of thin film devices is an effective method of creating PLICs and PLIS. Thin film InP-based edge emitters and thin film photodetectors have been integrated with polymer waveguides to create planar lightwave systems.
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Nan Marie Jokerst, S. Cho, S. Seo, and Martin A. Brooke "Planar lightwave integrated circuits integrated with thin film active optoelectronic devices", Proc. SPIE 5729, Optoelectronic Integrated Circuits VII, (25 March 2005); https://doi.org/10.1117/12.592723
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KEYWORDS
Thin films

Waveguides

Thin film devices

Silicon

Integrated optics

Optical interconnects

Optoelectronic devices

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