New comprehensive metrics and methodology for metrology tool fleet matching

Eric Solecky; Chas Archie; Bill Banke

doi:10.1117/12.602330

10 May 2005 New comprehensive metrics and methodology for metrology tool fleet matching

Eric Solecky, Chas Archie, Bill Banke

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.602330
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Measurement matching among metrology tools to the level of the precision specifications in the ITRS is highly desirable. A quantitative measure of this matching should combine single tool precision, tool-to-tool nonlinearities, and tool-to-tool offsets. In this paper we introduce Tool (under test) Matching Precision (TMP) and Fleet Measurement Precision (FMP) as these "bottom-line" metrics. TMP measures a single tool matching performance against a similar benchmark tool, while FMP measures the performance of the entire fleet. The paper describes a technique to diagnose both the tool under test and the fleet of tools when these bottom-line metrics do not meet the required specifications. Additionally, the exercise of assessing the matching of two tools or a fleet of tools requires a methodology that identifies and constructs a set of desirable artifacts, handles measurement induced sample damage, and provides a set of diagnostic metrics to aid in identifying root causes of matching problems. The methodology can be used for many different metrology systems. This case study will revolve around simulated data and actual data acquired from CD SEMs.

Citation Download Citation

Eric Solecky, Chas Archie, and Bill Banke "New comprehensive metrics and methodology for metrology tool fleet matching", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.602330

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