Optical characterization of diffractive optical elements replicated in polymers

Sigitas Tamulevicius; Giedrius Janusas; Asta Guobiene; Arvydas Palevicius; Vytautas Ostasevicius; Mindaugas Andrulevicius

doi:10.1117/12.597628

10 May 2005 Optical characterization of diffractive optical elements replicated in polymers

Sigitas Tamulevicius, Giedrius Janusas, Asta Guobiene, Arvydas Palevicius, Vytautas Ostasevicius, Mindaugas Andrulevicius

Author Affiliations +

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.597628
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Due to relative ease and cost effectiveness with which planar polymeric structures can be fabricated, diffractive optical elements replication in polymeric substrates are receiving global attention for a myriad of planar photonic and optoelectronic applications including optical interconnects. In this work we present an optical laser control method to control replication of microperiodic profile structures in polymers. Diffraction efficiency of diffraction gratings (originally produced in silicon, quartz glass and in replicated polymer substrates) was measured experimentally and estimated using linear dimensions of gratings or replica defined by atomic force microscopy (AFM). Diffraction efficiency of periodic structure was used to control the surface relief formation during the combined ion etching of crystalline Si (100) and replication of this structure using UV light hardening and hot embossing. The main experimental results are compared with the computer simulations where the standard programme (PCGrate-SX6.0) was employed.

Citation Download Citation

Sigitas Tamulevicius, Giedrius Janusas, Asta Guobiene, Arvydas Palevicius, Vytautas Ostasevicius, and Mindaugas Andrulevicius "Optical characterization of diffractive optical elements replicated in polymers", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.597628

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