Introduction of a die-to-database verification tool for the entire printed geometry of a die: geometry verification system NGR2100 for DFM

Tadashi Kitamura; Kazufumi Kubota; Toshiaki Hasebe; Futoshi Sakai; Shinichi Nakazawa; Neeti Vohra; Masahiro Yamamoto; Masahiro Inoue

doi:10.1117/12.599467

5 May 2005 Introduction of a die-to-database verification tool for the entire printed geometry of a die: geometry verification system NGR2100 for DFM

Tadashi Kitamura, Kazufumi Kubota, Toshiaki Hasebe, Futoshi Sakai, Shinichi Nakazawa, Neeti Vohra, Masahiro Yamamoto, Masahiro Inoue

Author Affiliations +

Proceedings Volume 5756, Design and Process Integration for Microelectronic Manufacturing III; (2005) https://doi.org/10.1117/12.599467
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

The Geometry Verification System NGR2100 enables verification of the entire die, on a resist or an after-etch wafer, by comparing images of a die with corresponding target CAD data. The system detects systematic defects by variable criteria setting for allowable deformation quantities and obtains a CD distribution diagram. The result of systematic defects can then be used to make root cause analysis. The CD distribution diagram can achieve stepper aberration analysis, process windows extraction, macro-loading effect analysis, FEM measurement, and trend analysis more efficiently. Consequently, the Geometry Verification System NGR2100 will contribute to quicker TAT for DFM in Design, Lithography and Mask production.

Citation Download Citation

Tadashi Kitamura, Kazufumi Kubota, Toshiaki Hasebe, Futoshi Sakai, Shinichi Nakazawa, Neeti Vohra, Masahiro Yamamoto, and Masahiro Inoue "Introduction of a die-to-database verification tool for the entire printed geometry of a die: geometry verification system NGR2100 for DFM", Proc. SPIE 5756, Design and Process Integration for Microelectronic Manufacturing III, (5 May 2005); https://doi.org/10.1117/12.599467

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available