Millimeter-wave GaAs stepped-impedance hairpin resonator filters using surface micromachining

Ju-Hyun Cho; Tae-Soon Yun; Tae-Jong Baek; Back-Seok Ko; Dong-Hoon Shin; Jong-Chul Lee

doi:10.1117/12.598757

16 May 2005 Millimeter-wave GaAs stepped-impedance hairpin resonator filters using surface micromachining

Ju-Hyun Cho, Tae-Soon Yun, Tae-Jong Baek, Back-Seok Ko, Dong-Hoon Shin, Jong-Chul Lee

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.598757
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

In this paper, microstrip stepped-impedance hairpin resonator (SIR) low-pass filter (LPF) and slow-wave band-pass filter (BPF) using dielectric supported air-gapped microstrip line (DAML) of surface micromachining on GaAs substrate are proposed. The DAML structure, which is a new low-loss micromachining transmission line, is useful for the integration of MEMS and/or MMIC components. Design parameters for the proposed SIR low-pass and slow-wave band-pass filters are derived based on stepped-impedance theory. The proposed slow-wave BPF is designed to produce a passband of 10% at the fundamental frequency of 60 GHz. and a new SIR LPF with aperture and IDC (inter-digital capacitor) is designed for 3-dB cutoff frequency of 33 GHz. The measurement results of the BPF filter and LPF filter agree well with simulation results. These filters are useful for many millimeter-wave system applications.

Citation Download Citation

Ju-Hyun Cho, Tae-Soon Yun, Tae-Jong Baek, Back-Seok Ko, Dong-Hoon Shin, and Jong-Chul Lee "Millimeter-wave GaAs stepped-impedance hairpin resonator filters using surface micromachining", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.598757

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KEYWORDS

Resonators

Bandpass filters

Linear filtering

Capacitance

Digital filtering

Gallium arsenide

Surface micromachining

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