Multispectral phase-crossing white-light interferometry

Michal Emanuel Pawlowski; Youhei Sakano; Yoko Miyamoto; Mitsuo Takeda

doi:10.1117/12.611644

14 February 2005 Multispectral phase-crossing white-light interferometry

Michal Emanuel Pawlowski, Youhei Sakano, Yoko Miyamoto, Mitsuo Takeda

Proceedings Volume 5776, Eighth International Symposium on Laser Metrology; (2005) https://doi.org/10.1117/12.611644
Event: Eighth International Conference on Laser Metrology, 2005, Merida, Mexico

Abstract

A new method of white-light fringes analysis called multi-spectral phase-crossing detection is presented. The technique is based on analysis of phase distributions of at least two white-light interferograms recorded simultaneously by detectors with mutually different spectral sensitivities. The analysis of the phase crossing of multiple white-light interferograms with different spectral bands gives us the possibility to find the position of zero optical path difference without ambiguity. The theoretical background and measurement results are presented.

Citation Download Citation

Michal Emanuel Pawlowski, Youhei Sakano, Yoko Miyamoto, and Mitsuo Takeda "Multispectral phase-crossing white-light interferometry", Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); https://doi.org/10.1117/12.611644

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