Inter-layer vias and TESH interconnection network for a 3-D heterogeneous sensor system on a chip

Shekhar Bhansali; Glenn Chapman; Vijay Jain

doi:10.1117/12.606938

27 May 2005 Inter-layer vias and TESH interconnection network for a 3-D heterogeneous sensor system on a chip

Shekhar Bhansali, Glenn Chapman, Vijay Jain

Proceedings Volume 5796, Unattended Ground Sensor Technologies and Applications VII; (2005) https://doi.org/10.1117/12.606938
Event: Defense and Security, 2005, Orlando, Florida, United States

Abstract

In a previous paper we had described a novel concept on ultra-small, ultra-compact, unattended multi-phenomenological sensor systems for rapid deployment, with integrated classification-and-decision-information extraction capability from the sensed environment. Specifically, we had proposed placing such integrated capability on a 3-D Heterogeneous System on a Chip (HSoC). This paper amplifies two key aspects of that future sensor technology. These are the creation of inter-layer vias by high aspect ratio MPS (Macro Porous Silicon) process, and the adaptation of the TESH (Tori connected mESHes) network to bind the diverse leaf nodes on multiple layers of the 3-D structure. Interesting also is the inter-relationship between these two aspects. In particular, the issue of overcoming via failures, catastrophic as well as high-resistance failures, through the existence of alternative paths in the TESH network and corresponding routing strategies is discussed. A probabilistic model for via failures is proposed and the testing of the vias between the sensor layer and the adjacent processing layer is discussed.

Citation Download Citation

Shekhar Bhansali, Glenn Chapman, and Vijay Jain "Inter-layer vias and TESH interconnection network for a 3-D heterogeneous sensor system on a chip", Proc. SPIE 5796, Unattended Ground Sensor Technologies and Applications VII, (27 May 2005); https://doi.org/10.1117/12.606938

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