Molecular dynamics study of surface erosion and defect generation in copper under cluster bombardment: influence of projectile mass and energy

Anton S. Kolesnikov; Evgeni E. Zhurkin

doi:10.1117/12.619507

29 April 2005 Molecular dynamics study of surface erosion and defect generation in copper under cluster bombardment: influence of projectile mass and energy

Anton S. Kolesnikov, Evgeni E. Zhurkin

Author Affiliations +

Proceedings Volume 5831, Eighth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2005) https://doi.org/10.1117/12.619507
Event: Eighth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 2004, St. Petersburg, Russian Federation

Abstract

Using classical Molecular Dynamics (MD) method we study surface erosion, primary defect production and sputtering processes occurring in crystalline Cu target with (111) surface plane under irradiation with Cu_N and Au_N monomers and polyatomic clusters (N = 1-55) with incident energies E/N = (100-1000) eV per one incident atom. Non additive effects in both sputtering and defect production were observed in case of cluster impact above a certain threshold cluster size (N_th) which depends on both incident energy and mass of the projectile. The relative efficiency of sputtering (rescaled per one incident atom) is found to be about of factor of two larger then corresponding efficiency of damage production. It was demonstrated that most typical kinds of damage produced inside the target after projectile impact are vacancies and vacancy clusters, and their number significantly prevails over number of interstitials. Moreover, the fraction of interstitial atoms reduces strongly with increase of cluster size N at a given energy per one incident atom. This fact can be explained taking into consideration high mobility of interstitial atoms, which result in formation of ad-atom conglomerates on the surface. Impact of a cluser with N ≥ 6 and with total incident energy above some threshold value (about 5 keV) results in formation of pronounced microcrater surrounded by ad-atom rim, whereas below this energy threshold, typical topographic features of the impact region is either ad-atoms hillocks or shallow crater.

Citation Download Citation

Anton S. Kolesnikov and Evgeni E. Zhurkin "Molecular dynamics study of surface erosion and defect generation in copper under cluster bombardment: influence of projectile mass and energy", Proc. SPIE 5831, Eighth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (29 April 2005); https://doi.org/10.1117/12.619507

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
11 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Chemical species

Sputter deposition

Copper

Ions

Gold

Crystals

Energy efficiency

Show All Keywords

Keywords/Phrases

Search In:

Publication Years